Nano-photolithography using doughnut beam induced photoinhibition

Yaoyu Cao(Swinburne University of Technology), Min Gu, Zongsong Gan(Zhejiang Ocean University), Baohua Jia(Nanomaterials Research (United States)), Richard A. Evans(Commonwealth Scientific and Industrial Research Organisation)
Swinburne figshare (Swinburne University of Technology)
January 1, 2010
Cited by 1


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