11:00 S1-2 Epi Process Margin Improvement Using Co-implantation to Control 13 Phosphorus Diffusion in a DRAM Manufacturing

Satoshi Takagi, T. A. Henry, B. N. Guo, Jie Huang, Ruey Yu Hung, K. H. Shim, Ying Lin(Guangdong University of Technology), Michael Hsiao, H. L. Sun, Sheng-Jie Wei, Takehiko Toh, A. Hsu, YinQuan Yu, B. Colombeau, Shuyan Ji(Chongqing University), W. Zou, Li-Yuan Chiou(National Taiwan University of Science and Technology)

Unknown

January 1, 2011

Cited by 0

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