Nanopore fabrication in amorphous Si: Viscous flow model and comparison to experiment

H. George(Harvard University), Michael J. Aziz(Harvard University), Yuye Tang(Columbia University), Xi Chen(Beijing Jiaotong University), Jiali Li(University of Arkansas at Fayetteville), J. A. Golovchenko(Lexington City Schools), John W. Hutchinson(Harvard University Press)
Journal of Applied Physics
July 1, 2010
Cited by 21


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