Ion-beam sculpting at nanometre length scales

Jiali Li(Xi'an Jiaotong University), J. A. Golovchenko(Lexington City Schools), Daniel Branton(Harvard University), Ciaran J. McMullan(Harvard University), Michael J. Aziz(Harvard University), Derek Stein(Brown University)
Nature
July 1, 2001
Cited by 1,663


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