Study of Carrier Mobility of Low-Energy High-Dose Ion Implantations

Shu Qin(Micron (United States)), Allen McTeer(Micron (United States)), Yongjun Hu(South China Normal University), Jason Reyes(University of California, Los Angeles), Simon A. Prussin(University of California, Los Angeles)
IEEE Transactions on Plasma Science
December 10, 2010
Cited by 15


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