A novel approach of using a MBE template for ALD growth of high-κ dielectrics

Kuen Yong Lee(Hanyang University), Raynien Kwo(National Tsing Hua University), M. L. Huang(National Tsing Hua University), Chia‐Hsuan Chang(National Tsing Hua University), Tai‐Bor Wu(National Tsing Hua University), Yi-Shi Chiu(National Tsing Hua University), Y.J. Lee(National Tsing Hua University), W.C. Lee(National Tsing Hua University), M. Hong
Journal of Crystal Growth
January 26, 2007
Cited by 7


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