Micromachined thermoelectric test device based on silicon/germanium superlattices: Simulation, preparation and characterization of thermoelectric behavior
J. Schumann(Leibniz Institute for Solid State and Materials Research), Friedemann Vöelklein(Leibniz Institute for Solid State and Materials Research), H. Vinzelberg(Leibniz Institute for Solid State and Materials Research), J. Thomas(University of Calicut), C. Kunzel(Leibniz Institute for Solid State and Materials Research), M. Hecker(Leibniz Institute for Solid State and Materials Research), Ch. Kleint(Leibniz Institute for Solid State and Materials Research), Harald Boettner(Fraunhofer Institute for Physical Measurement Techniques), A. Lambrecht(Fraunhofer Institute for Physical Measurement Techniques), J. Nurnus(Fraunhofer Institute for Physical Measurement Techniques)
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