Co-gas impact of B2H6 plasma diluted with helium on the plasma doping process in a pulsed glow-discharge system
Shu Qin(Micron (United States)), Yongjun Hu(South China Normal University), Allen McTeer(Micron (United States))
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena
October 26, 2005
Cited by 11
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