Effect of Implant Temperature on Extended Defects Craeted by Ion Implantation in Silicon

J. Wong‐Leung(Australian National University), John FitzGerald(California Digital Library), C. Jagadish(Australian National University), S. Fatima(Australian National University)
Defect and diffusion forum/Diffusion and defect data, solid state data. Part A, Defect and diffusion forum
August 1, 2000
Cited by 1


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