Local indentation modulus characterization via two contact resonance frequencies atomic force acoustic microscopy

Daniele Passeri(Sapienza University of Rome), Joost J. Vlassak(Harvard University), Silvia Orlanducci(University of Rome Tor Vergata), Maria Paola Germanò(Sapienza University of Rome), Maria Letizia Terranova(University of Rome Tor Vergata), A. Alippi(Institute of Acoustics and Sensors "Orso Mario Corbino"), Emanuela Tamburri(University of Rome Tor Vergata), Alexandre Fiori(University of Rome Tor Vergata), A. Bettucci(Sapienza University of Rome), Marco Rossi(Sapienza University of Rome)
Microelectronic Engineering
November 4, 2006
Cited by 23


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