Effect of $\hbox{SiN}_{x}$ Gate Dielectric Deposition Power and Temperature on a-Si:H TFT Stability

Alex Z. Kattamis(Princeton University), S. Wagner(Princeton University), H. Glesková(Princeton University), James C. Sturm(Princeton University), Kunigunde H. Cherenack(Princeton University), Bahman Hekmatshoar(Princeton University), I‐Chun Cheng(Princeton University)
IEEE Electron Device Letters
June 28, 2007
Cited by 22


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