Stress and source conditions of DC magnetron sputtered Nb films

R.S. Amos(University of Virginia), Arthur W. Lichtenberger(University of Virginia), P.E. Breyer(University of Virginia), H.H. Huang(University of Virginia)
IEEE Transactions on Applied Superconductivity
June 1, 1995
10.1109/77.403051
Cited by 25

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