Atomic Layer Deposition to Fine-Tune the Surface Properties and Diameters of Fabricated Nanopores
Peng Chen(Sichuan University), Daniel Branton(Harvard University), Roy G. Gordon(Harvard University), Toshiyuki Mitsui(Harvard University), J. A. Golovchenko(Lexington City Schools), Damon B. Farmer(IBM (United States))
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