Atomic Layer Deposition to Fine-Tune the Surface Properties and Diameters of Fabricated Nanopores

Peng Chen(Sichuan University), Daniel Branton(Harvard University), Roy G. Gordon(Harvard University), Toshiyuki Mitsui(Harvard University), J. A. Golovchenko(Lexington City Schools), Damon B. Farmer(IBM (United States))
Nano Letters
June 25, 2004
Cited by 415


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