Solubility limits of dopants in 4H–SiC

M. K. Linnarsson(KTH Royal Institute of Technology), B. G. Svensson(KTH Royal Institute of Technology), Martin S. Janson(KTH Royal Institute of Technology), U. Zimmermann(Uppsala University), Adolf Schöner(Kista Photonics Research Center), C. Jagadish(Australian National University), J. Wong‐Leung(Australian National University)
Applied Surface Science
December 30, 2002
Cited by 24


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