Dual integrated actuators for extended range high speed atomic force microscopy

Todd Sulchek(Georgia Institute of Technology), D. Adderton, Daniel A. Fletcher(Lawrence Berkeley National Laboratory), Jonathan D. Adams(Stanford University), S. C. Minne(Stanford University), A. Atalar(Bilkent University), C. F. Quate(Stanford University)
Applied Physics Letters
September 13, 1999
Cited by 58


Related Papers