A multiscale systems approach to microelectronic processes
Richard D. Braatz(Massachusetts Institute of Technology), Rudiyanto Gunawan(University of Illinois Urbana-Champaign), Yan Qin(Shanghai Electric (China)), Effendi Rusli(University of Illinois Urbana-Champaign), Richard C. Alkire(University of Illinois Urbana-Champaign), Timothy O. Drews(University of Illinois Urbana-Champaign), Mohan Karulkar(University of Illinois Urbana-Champaign), Edmund G. Seebauer(University of Illinois Urbana-Champaign), Michael Y. L. Jung(University of Illinois Urbana-Champaign), Xue Feng(Tsinghua University)
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