50-nm x-ray lithography using synchrotron radiation
Y. Chen(Laboratoire d'Étude des Microstructures), H. Launois(Centre National de la Recherche Scientifique), R. K. Kupka(Centre National de la Recherche Scientifique), M. F. Ravet(Centre National de la Recherche Scientifique), F. Rousseaux(Université Paris-Sud), D. Decanini(Université Paris-Sud), F. Carcenac(Centre National de la Recherche Scientifique)
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena
November 1, 1994
Cited by 60
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