Comparison of structure and properties of femtosecond and nanosecond laser-structured silicon

Catherine H. Crouch(Harvard University), François Y. Génin(Lawrence Livermore National Laboratory), Jeffrey M. Warrender(Harvard University), Michael J. Aziz(Harvard University), Eric Mazur(Harvard University), James E. Carey(Harvard University)
Applied Physics Letters
March 8, 2004
10.1063/1.1667004
Cited by 401

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