Comparison of structure and properties of femtosecond and nanosecond laser-structured silicon

Catherine H. Crouch(Harvard University), François Y. Génin(Lawrence Livermore National Laboratory), Jeffrey M. Warrender(Harvard University), Michael J. Aziz(Harvard University), Eric Mazur(Harvard University Press), James E. Carey(Harvard University)
Applied Physics Letters
March 8, 2004
10.1063/1.1667004
Cited by 401

Related Papers

Femtosecond laser micromachining in transparent materials
|Nature Photonics|2008|3.2k
Ion-beam sculpting at nanometre length scales
|Nature|2001|1.7k
Subwavelength-diameter silica wires for low-loss optical wave guiding
|Nature|2003|1.5k
Inducing and probing non-thermal transitions in semiconductors using femtosecond laser pulses
|Nature Materials|2002|983
Microstructuring of silicon with femtosecond laser pulses
|Applied Physics Letters|1998|807