cw argon laser annealing of ion-implanted silicon

D. H. Auston, T. Venkatesan(National University of Singapore), J. A. Golovchenko(Lexington City Schools), C. M. Surko(University of California San Diego), P. R. Smith(AT&T (United States))
Applied Physics Letters
September 15, 1978
Cited by 91


Related Papers