Immersion defect performance and particle control method for 45nm mass production
Takahito Chibana(Canon (Japan)), Hirohisa Oda(Canon (Japan)), Masamichi Kobayashi(Ryukoku University), Youji Kawasaki(Canon (Japan)), Hitoshi Nakano(Canon (Japan)), Mikio Arakawa(Canon (Japan)), Yoichi Matsuoka(Canon (Japan)), Masayuki Tanabe(Canon (Japan))
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
March 4, 2008
Cited by 5
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