Hard x-ray nano patterning using a sectioned multilayer
Su Yong Lee(Gwangju Institute of Science and Technology), Do Young Noh(Gwangju Institute of Science and Technology), Chian Liu(Argonne National Laboratory), G. B. Stephenson(Argonne National Laboratory), Albert T. Macrander(Argonne National Laboratory), In Hwa Cho(Gwangju Institute of Science and Technology), Hanfei Yan(Brookhaven National Laboratory), Jae Myung Kim(Pohang University of Science and Technology), Ray Conley(Brookhaven National Laboratory), J. Mäser(Argonne National Laboratory), Hyon Chol Kang(Chosun University)
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