Nanolithography using a laser focused neutral atom beam

Vasant Natarajan(Indian Institute of Science Bangalore), G. Timp(University of Notre Dame), D. M. Tennant(University of Tennessee at Knoxville), R. E. Behringer(AT&T (United States))

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

November 1, 1995

10.1116/1.588274

Cited by 11

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