The effects of passivation layer and film thickness on the mechanical behavior of freestanding electroplated Cu thin films with constant microstructure

Yong Xiang(University of Electronic Science and Technology of China), Andrew J. McKerrow(Texas Instruments (United States)), Joost J. Vlassak(Harvard University), M.T. Pérez‐Prado(IMDEA Materials), Ting Y. Tsui(Advanced Micro Devices (United States))
MRS Proceedings
January 1, 2003
Cited by 9


Related Papers