Fabrication of nanoscale patterns in lithium fluoride crystal using a 13.5 nm Schwarzschild objective and a laser produced plasma source

Xin Wang(Tongji University), Pengfei He(Tongji University), Shengzhen Yi(Tongji University), Baozhong Mu(Tongji University), Li Jiang(Tongji University), Zhanshan Wang(Tongji University), Jingtao Zhu(Tongji University)
Review of Scientific Instruments
December 1, 2011
Cited by 8


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