Performance improvement of reactive magnetron sputtering ZnO-TFT after annealing in N<inf>2</inf> ambient

Hui-Kun Yao(Peking University), Dedong Han(Peking University), Wen-Tong Zhu(Peking University), Jian Cai(Peking University), Lei Sun(Maternal and Child Health Hospital of Xinjiang Uygur Autonomous Region), Youfeng Geng(Peking University), Yu-Qian Xia(Peking University), Yongqi Li(Anhui Agricultural University)
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October 1, 2012
Cited by 0


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