Fabrication and preliminary testing of X-ray lenses in thick SU-8 resist layers

V. Nazmov(Fraunhofer Institute for Microengineering and Microsystems), E. Reznikova(Fraunhofer Institute for Microengineering and Microsystems), J. Mohr(Fraunhofer Institute for Microengineering and Microsystems), A. Snigirev(European Synchrotron Radiation Facility), I. Snigireva(European Synchrotron Radiation Facility), Sven Achenbach(Fraunhofer Institute for Microengineering and Microsystems), V. Saile(Fraunhofer Institute for Microengineering and Microsystems)
Microsystem Technologies
December 1, 2004
Cited by 53

Abstract


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