Arsenic and gallium atom location on silicon (111)
J. R. Patel, D. M. Chen(Western University), P. E. Freeland(AT&T (United States)), J. A. Golovchenko(Lexington City Schools), Mark S. Hybertsen(Brookhaven National Laboratory), J. Zegenhagen(Diamond Light Source)
Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena
July 1, 1989
Cited by 47
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