Proximity gettering of Au to ion beam induced defects in silicon

J. Wong‐Leung(Australian National University), J. M. Poate, E. Nygren(Australian National University), R. G. Elliman(Australian National University), D. J. Eaglesham, D. C. Jacobson(AT&T (United States)), J. S. Williams(University of Illinois Urbana-Champaign)
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
March 1, 1995
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