Gadolinium scandate thin films as an alternative gate dielectric prepared by electron beam evaporation
Martin Wagner(Bruker (United States)), Stefan De Gendt(Imec the Netherlands), J. Schubert(Forschungszentrum Jülich), Matty Caymax(IMEC), T. Heeg(Forschungszentrum Jülich), S. Mantl(Forschungszentrum Jülich), St. Lenk(Forschungszentrum Jülich), Chao Zhao
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