Polymer diffusion as a probe of damage in ion or plasma etching

S. F. Tead(Cornell University), Frank D. Egitto(Endicott College), Gianluigi Marra(Cornell University), William E. Vanderlinde(Cornell University), Edward J. Kramer(University of California, Santa Barbara), A. L. Ruoff(Cornell University)
Journal of Applied Physics
September 15, 1990
Cited by 11


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