The effect of elastic modulus on channel crack propagation in organosilicate glass films
Ting Y. Tsui(Advanced Micro Devices (United States)), Joost J. Vlassak(Harvard University), Russell D. Fields(Texas Instruments (United States)), Andrew J. McKerrow(Texas Instruments (United States)), Jeannette M. Jacques(Texas Instruments (United States)), A. J. Griffin(Texas Instruments (United States))
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