Metalorganic chemical vapor deposition of InGaAsN using dilute nitrogen trifluoride
Sixuan Cheng(Union Hospital), Robert F. Hicks(University of California, Los Angeles), Atif Noori(University of California, Los Angeles), R.L. Woo(University of California, Los Angeles), Mark S. Goorsky(University of California, Los Angeles), G. Malouf(University of California, Los Angeles)
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