Growth of vacuum evaporated ultraporous silicon studied with spectroscopic ellipsometry and scanning electron microscopy

Kate Kaminska(Queen's University), Kevin Robbie(Linköping University), Aram Amassian(King Abdullah University of Science and Technology), L. Martinů(Regroupement Québécois sur les Matériaux de Pointe)
Journal of Applied Physics
December 13, 2004
Cited by 59


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