Growth of vacuum evaporated ultraporous silicon studied with spectroscopic ellipsometry and scanning electron microscopy

Kate Kaminska(Queen's University), Kevin Robbie(Queen's University), Aram Amassian(North Carolina State University), L. Martinů(Polytechnique Montréal)
Journal of Applied Physics
December 13, 2004
Cited by 59


Related Papers

Sculptured thin films and glancing angle deposition: Growth mechanics and applications
|Journal of Vacuum Science & Technology A Vacuum Surfaces and Films|1997|950
Advanced techniques for glancing angle deposition
|Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena|1998|508