Sculptured thin films and glancing angle deposition: Growth mechanics and applications

Kevin Robbie(Linköping University), Michael J. Brett(University of Alberta)
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
May 1, 1997
Cited by 950


Related Papers

Advanced techniques for glancing angle deposition
|Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena|1998|508
First thin film realization of a helicoidal bianisotropic medium
|Journal of Vacuum Science & Technology A Vacuum Surfaces and Films|1995|243
Fabrication of thin films with highly porous microstructures
|Journal of Vacuum Science & Technology A Vacuum Surfaces and Films|1995|233