Grazing-incidence small angle x-ray scattering studies of phase separation in hafnium silicate films

Susanne Stemmer(University of California, Santa Barbara), Söenke Seifert(Argonne National Laboratory), Youli Li(University of California, Santa Barbara), Patrick Lysaght, S. K. Streiffer(Argonne National Laboratory), Brendan Foran, P. H. Fuoss(Northern Illinois University)
Applied Physics Letters
October 13, 2003
Cited by 96


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