Self-shadowing and surface diffusion effects in obliquely deposited thin films

D. Vick(University of Alberta), T. Smy(Carleton University), M. Seto(University of Alberta), Kevin Robbie(Linköping University), Michael J. Brett(University of Alberta), L. J. Friedrich(University of Alberta), S. K. Dew(University of Alberta)
Thin Solid Films
February 1, 1999
Cited by 169


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