Strain relaxation of SiGe islands on compliant oxide

H. Yin(Princeton University), James C. Sturm(Princeton University), Rui Huang(Southwest Jiaotong University), S. R. Shieh(Princeton University), C. K. Inoki(Albany State University), T. S. Kuan(Albany State University), T. S. Duffy(Princeton University), Karl D. Hobart(United States Naval Research Laboratory), Fritz J. Kub(United States Naval Research Laboratory), Zhigang Suo(Harvard University)
Journal of Applied Physics
June 15, 2002
Cited by 75


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