A fast and ultra-precision laser heterodyne interferometry signal processing method based on digital delay line loop
Lei Yan(Harbin Institute of Technology), Jiubin Tan(Harbin Institute of Technology), Xiaofei Diao(National Institute of Metrology), Pengcheng Hu(Harbin Institute of Technology)
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
October 2, 2008
Cited by 4
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