Dysprosium scandate thin films as an alternate amorphous gate oxide prepared by metal-organic chemical vapor deposition
Reji Thomas(Lovely Professional University), Matty Caymax(IMEC), Rainer Waser(X-Fab (Germany)), P. Ehrhart(Forschungszentrum Jülich), M. Luysberg(Ernst Ruska Centre), M. Roeckerath, Markus Boese(Carl Zeiss (Germany)), Sven Van Elshocht(Columbia University), E. Rije
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