Mechanical response of thin films with helical microstructures
M. Seto(University of Alberta), Lindsay Kuhn(Hysitron (United States)), Kevin Robbie(Linköping University), Michael J. Brett(University of Alberta), D. Vick(University of Alberta)
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena
September 1, 1999
Cited by 72
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