Study and estimation of the residual stress in porous silicon layer formed on the surface of a crystalline silicon substrate

M Ghannam(Kuwait University), Robert Mertens(Humboldt-Universität zu Berlin), Jef Poortmans(IMEC), Valérie Depauw(IMEC), Mostafa Hassan, G. Beaucarne(Dow Chemical (Belgium))
Thin Solid Films
February 7, 2008
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