The effect of ion bombardment on the properties of TiO films deposited by a modified ion-assisted PECVD technique

Nilson Cristino da Cruz(Universidade de Sorocaba), Celso U. Davanzo(Universidade Estadual de Campinas (UNICAMP)), B. C. Trasferetti(Universidade Estadual de Campinas (UNICAMP)), Manfredo H Tabacknics, Elidiane Cipriano Rangel(Universidade de Sorocaba)
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
April 1, 2001
Cited by 6


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