Texture analysis of Al-doped ZnO thin films prepared by in-line reactive MF magnetron sputtering

Ruijiang Hong(Kunming University of Science and Technology), Bernd Szyszka(Fraunhofer Institute for Surface Engineering and Thin Films), K. Helming(Bruker (Germany)), Xin Jiang(Inner Mongolia University of Technology)
Applied Surface Science
December 10, 2003
Cited by 41


Related Papers