SOI nanophotonic waveguide structures fabricated with deep UV lithography

Wim Bogaerts(Ghent University), Roel Baets(Ghent University), Vincent Wiaux(Imec the Netherlands), Jan Van Campenhout(Ghent University), Bert Luyssaert(Ghent University), Dirk Taillaert(Ghent University), Pieter Dumon(Ghent University), S. Beckx(Imec the Netherlands), Dries Van Thourhout(Ghent University Hospital)
Photonics and Nanostructures - Fundamentals and Applications
August 5, 2004
Cited by 31


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