SOI nanophotonic waveguide structures fabricated with deep UV lithography
Wim Bogaerts(Ghent University), Roel Baets(Ghent University), Vincent Wiaux(Imec the Netherlands), Jan Van Campenhout(Ghent University), Bert Luyssaert(Ghent University), Dirk Taillaert(Ghent University), Pieter Dumon(Ghent University), S. Beckx(Imec the Netherlands), Dries Van Thourhout(Ghent University Hospital)
Photonics and Nanostructures - Fundamentals and Applications
August 5, 2004
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