Ternary rare-earth metal oxide high-k layers on silicon oxide
Chao Zhao, Darrell G. Schlom(University of Salerno), J. Schubert(Forschungszentrum Jülich), Matty Caymax(IMEC), Bert Brijs(IMEC), H. Bender(IMEC), T. Heeg(Forschungszentrum Jülich), A. Stesmans(KU Leuven), Olivier Richard(IMEC), V. V. Afanas’ev(IMEC), T. Witters(IMEC)
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