Thermoelastic Damping in the Size-Dependent Microplate Resonators Based on Modified Couple Stress Theory

Zuo-Yang Zhong(Shanghai Jiao Tong University), Mingyang Wang(PLA Army Engineering University), Wenming Zhang(Ministry of Education), Guang Meng(Shanghai Jiao Tong University)
Journal of Microelectromechanical Systems
July 9, 2014
Cited by 63


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