Mn Implantation for New Applications of 4H-SiC

Margareta K. Linnarsson(Australian National University), А. М. Гришин(KTH Royal Institute of Technology), J. Wong‐Leung(Australian National University), S. I. Khartsev(KTH Royal Institute of Technology), Anders Hallén(KTH Royal Institute of Technology)
Materials science forum
May 14, 2012
Cited by 1


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