Ion Beam Techniques for Low K Materials Characterization

H. Bakhru(University at Albany, State University of New York), C. Jin(Texas Instruments (United States)), Joel L. Plawsky(Rensselaer Polytechnic Institute), M.J. DelaRosa(Rensselaer Polytechnic Institute), S. Nitta(Rensselaer Polytechnic Institute), J. F. McDonald(Rensselaer Polytechnic Institute), V. Pisupatti(Rensselaer Polytechnic Institute), B. Wang(Rensselaer Polytechnic Institute), S. Kim(Rensselaer Polytechnic Institute), Jeffrey B. Fortin(Rensselaer Polytechnic Institute), Christoph Steinbrüchel(Rensselaer Polytechnic Institute), A. K. Jain(Rensselaer Polytechnic Institute), A. Senthil Kumar(University at Albany, State University of New York), G.‐R. Yang, Peter Wayner(Rensselaer Polytechnic Institute), T. A. Kaplan(University at Albany, State University of New York), W. Gill(Rensselaer Polytechnic Institute), X. Tang(West China Medical Center of Sichuan University), James A. Moore(Rensselaer Polytechnic Institute), Toh‐Ming Lu(Rensselaer Polytechnic Institute)
MRS Proceedings
January 1, 1998
Cited by 8


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