Ultra-Shallow Junction Formation—Physics and Advanced Technology
B. Colombeau(University of Surrey), Yevgeniy V. Kondratenko, F. Bénistant(University of Surrey), K. R. C. Mok(University of Surrey), Andrew J. Smith(Intel (United States)), R. Gwilliam(University of Surrey), Davin Tan(Singapore University of Technology and Design), Amitabh Jain, C. M. Ng(University of Surrey), L. Chan, Edmund G. Seebauer(University of Illinois Urbana-Champaign), Susan B. Felch, S. H. Yeong(University of Surrey)
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