New Systematic Evaluation Method for Attenuated Phase-Shifting Mask SpecificationsIchiro Kagami, Tohru Ogawa, Kiichi Ishikawa et al.|Japanese Journal of Applied Physics|1995Cited by 2
<title>Attenuated phase-shifting mask specification with modified beam illumination</title>Ichiro Kagami, Satoru Nozawa, Minoru Sugawara et al.|Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE|1995Cited by 0